鎺ュ湴闆婚樆娓�(c猫)瑭﹀剙妾㈡脯(c猫)鏂规硶
闆婚樆娓�(c猫)瑭﹀剙锛屾槸娓�(c猫)閲忕墿楂斿皫(d菐o)闆绘�х殑涓�绋剙鍣�锛岄浕闃绘脯(c猫)瑭﹀剙琚唬娉涚殑鎳�(y墨ng)鐢ㄤ簬闆绘埃瀹夊叏妾㈡煡鑸囨帴鍦板伐绋嬬宸ラ(y脿n)绛夊牬(ch菐ng)鍚�銆傞浕闃绘脯(c猫)瑭﹀剙鐨勭ó椤�(l猫i)姣旇純澶氾紝鍖呮嫭鎺ュ湴闆婚樆娓�(c猫)瑭﹀剙銆佺禃绶ｉ浕闃绘脯(c猫)瑭﹀剙銆佹帴鍦伴浕闃绘脯(c猫)瑭﹀剙銆佺洿娴侀浕闃绘脯(c猫)閲�?j墨)x銆佽〃闈㈤浕闃绘脯(c猫)瑭﹀剙浠ュ強鍥炶矾闆婚樆娓�(c猫)瑭�
浣跨敤鏂规硶锛�
鎺ュ湴闆婚樆娓�(c猫)瑭﹀剙鏄寚鍩嬪叆鍦颁笅鐨勬帴鍦伴珨闆婚樆鍜屽湡澹ゆ暎娴侀浕闃�锛岄�氬父閲囩敤鍨嬫帴鍦伴浕闃绘脯(c猫)閲�?j墨)x(鎴栫ū鎺ュ湴闆婚樆鎼栬〃)閫�(j矛n)琛屾脯(c猫)閲忋�傚瀷娓�(c猫)閲�?j墨)x鍏跺褰㈣垏鏅�氱禃绶ｆ悥琛ㄥ樊涓嶅锛屼篃灏辨寜缈�(x铆)鎱ｇū鐐烘帴鍦伴浕闃绘悥琛ㄣ�傚瀷鎼栬〃鐨勫褰㈢祼(ji茅)妲�(g貌u)闅ㄥ瀷铏�(h脿o)鐨勪笉鍚岀◢鏈夎畩鍖�锛屼絾浣跨敤鏂规硶鍩烘湰鐩稿悓銆傚瀷鎺ュ湴闆婚樆娓�(c猫)閲�?j墨)x闅ㄨ〃闄勫付鎺ュ湴鎺㈡脯(c猫)妫掑叐鏀�佸皫(d菐o)绶氫笁鏍�銆備娇鐢ㄦ柟娉曞拰娓�(c猫)閲忔椹熷涓�:
(a)鎺ュ湴闆婚樆娓�(c猫)瑭﹀剙(b)閫ｆ帴绶�(c)娓�(c猫)閲忔帴鍦版
1銆佹媶闁�(k膩i)鎺ュ湴骞茬窔鑸囨帴鍦伴珨鐨勯�ｆ帴榛�(di菐n)锛屾垨鎷嗛枊(k膩i)鎺ュ湴骞茬窔涓婃墍鏈夋帴鍦版敮绶氱殑閫ｆ帴榛�(di菐n)銆�
2銆佸皣鍏╂牴鎺ュ湴妫掑垎鍒ユ彃鍏ュ湴闈�400mm娣�锛屼竴鏍归洟鎺ュ湴楂�40m閬�(yu菐n)锛屽彟涓�鏍归洟鎺ュ湴楂�20m閬�(yu菐n)銆�
3銆佹妸鎼栬〃缃簬鎺ュ湴楂旇繎鏃佸钩鏁寸殑鍦版柟锛岀劧鍚庨��(j矛n)琛屾帴绶�銆�
(1)鐢ㄤ竴鏍归�ｆ帴绶氶�ｆ帴琛ㄤ笂鎺ョ窔妯丒鍜屾帴鍦拌缃殑鎺ュ湴楂擡鈥�銆�
(2)鐢ㄤ竴鏍归�ｆ帴绶氶�ｆ帴琛ㄤ笂鎺ョ窔妯丆鍜岄洟鎺ュ湴楂�40m閬�(yu菐n)鐨勭殑鎺ュ湴妫扖鈥�銆�
(3)鐢ㄤ竴鏍归�ｆ帴绶氶�ｆ帴琛ㄤ笂鎺ョ窔妯丳鍜岄洟鎺ュ湴楂�20m閬�(yu菐n)鐨勬帴鍦版P鈥�銆�
4銆佹牴鎿�(j霉)琚脯(c猫)鎺ュ湴楂旂殑鎺ュ湴闆婚樆瑕佹眰锛岃(di脿o)绡�(ji茅)濂界矖瑾�(di脿o)鏃嬮垥(涓婃湁涓夋獢鍙(di脿o)鑼冨湇)銆�
5銆佷互绱�120杞�(zhu菐n)/鍒嗛悩鐨勯�熷害鍧囧嫽鍦�?f霉)u鍕�(d貌ng)鎼栬〃銆傜暥(d膩ng)琛ㄩ嚌鍋忚綁(zhu菐n)鏅�(sh铆)锛岄毃鍗宠(di脿o)绡�(ji茅)寰(di脿o)鎾ョ洡(p谩n)锛岀洿鑷宠〃閲濆眳涓偤姝��備互寰(di脿o)鎾ョ洡(p谩n)瑾�(di脿o)瀹氬悗鐨勮畝鏁�(sh霉)锛屽幓涔樹互绮楄(di脿o)瀹氫綅鍊嶆暩(sh霉)锛屽嵆鏄娓�(c猫)鎺ュ湴楂旂殑鎺ュ湴闆婚樆銆備緥濡傚井瑾�(di脿o)璁�鏁�(sh霉)鐐�0.6锛岀矖瑾�(di脿o)鐨勯浕闃诲畾浣嶅�嶆暩(sh霉)鏄�10锛屽墖琚脯(c猫)鐨勬帴鍦伴浕闃绘槸6惟銆�
6銆佺偤浜嗕繚璀夋墍娓�(c猫)鎺ュ湴闆婚樆鍊肩殑鍙潬锛屾噳(y墨ng)鏀硅畩鏂逛綅閲嶆柊閫�(j矛n)琛屽京(f霉)娓�(c猫)銆傚彇骞炬娓�(c猫)寰楀�肩殑骞冲潎鍊间綔鐐烘帴鍦伴珨鐨勬帴鍦伴浕闃�銆�
琛ㄩ潰浠嬬垂
琛ㄩ潰闆婚樆娓�(c猫)瑭﹀剙娓�(c猫)閲忛樆鎶楁韩搴﹀拰婵曞害銆�"婵曞害鍜屾韩搴︽渻(hu矛)褰遍熆闃绘姉锛屾墍浠ュ繀闋堟脯(c猫)閲�" 娓�(c猫)閲忚〃闈㈤樆鎶�10 -10 姝愬/鈻�锛屾脯(c猫)閲忛浕闃�10 -10 姝愬
鎿嶄綔鎵嬪唺(c猫)
娓�(c猫)閲忓墠锛岄鍏堢⒑淇濆緟娓�(c猫)琛ㄩ潰骞插噲鐒�(w煤)姹℃煋
琛ㄩ潰闃绘姉
1 銆佸钩琛屾帰闋樆鎶楁脯(c猫)閲忔硶(Parallel Probe ResistivityMethod)
骞宠鎺㈤牠闃绘姉娓�(c猫)閲忔硶鏄鍚圗OS/ESD-S11.11-1993妯�(bi膩o)婧�(zh菙n)鐨勬脯(c猫)閲忔柟娉�锛岄�欐槸涓�绋揩閫熺殑娓�(c猫)閲忓钩闈㈠潎鍕绘潗鏂欓浕闃诲�肩殑鏂规硶銆傞�欑ó鏂规硶涔熼仼鍚堜簬澶氬堡鏉愭枡鐨勬脯(c猫)閲忥紝浣嗘槸鍦ㄩ樆鎶楀�煎牨(b脿o)鍛婁腑蹇呴爤娉ㄦ槑娓�(c猫)閲忔檪(sh铆)鐨勬韩搴﹀拰婵曞害姊濅欢銆� A 銆佸皣琛ㄦ斁鍦ㄥ緟娓�(c猫)閲忕殑鐗╅珨琛ㄩ潰銆�
B銆佸皣闁�(k膩i)闂�(gu膩n)瑾�(di脿o)鍒版墍闇�鐨勯浕澹撲綅缃�(10浼忔垨100浼�)
C銆佷互澶х磩5纾呯殑澹撳姏鎸佺簩(x霉)鎸変笅娓�(c猫)閲忔寜閳�锛屾鏅�(sh铆)LCD灞�?x铆)顠禓绀哄嚭娓�(c猫)閲忕殑琛ㄩ潰闃绘姉锛屾韩搴﹀拰鐩稿皪(du矛)婵曞害鍊�锛屾暣鍊�(g猫)娓�(c猫)閲忛亷(gu貌)绋嬪ぇ绱勭偤鍗佷簲绉掔ó銆�
路琛ㄩ潰闃绘姉鍠綅鐐烘瓙濮�/鈻�
路婧害鍠綅鐐烘敐寮�
路鐩稿皪(du矛)婵曞害鍠綅鐐虹櫨鍒嗘瘮
鍦ㄦ瘡娆℃脯(c猫)閲忎腑锛屾寜涓嬫脯(c猫)閲忔寜閳曞悗锛屾脯(c猫)瑭﹀剙灏囬�ｇ簩(x霉)椤ず淇暣娓�(c猫)閲忓��锛屾澗闁�(k膩i)鎸夐垥鍚庣磩鍥涘崄浜旂鍏�(n猫i)锛岄’绀虹殑鏄渶鍚庝竴鍊�(g猫)娓�(c猫)閲忓��銆�
2 銆佸悓蹇冪挵(hu谩n)鎺㈤牠闃绘姉娓�(c猫)閲忔硶(Concentric Ring Probe Resistivitymethod)(鍚屽績鐠�(hu谩n)鎺㈤牠鐐洪伕璩�(g貌u)浠�)
灏囬�ｇ窔鎻掗牠鎻掑叆琛ㄧ殑鍏╁��(g猫) 3.5姣背鎻掑瓟锛屽苟灏囬钑夋彃闋垏鍚屽績鐠�(hu谩n)鎺㈤牠 (閬歌臣(g貌u)浠�)鐩歌伅(li谩n)銆傚皣鎺㈤牠鏀惧湪寰呮脯(c猫)瑭︾墿楂旇〃闈㈠悗锛屾寜涓嬫寜閳曠磩15绉掗悩鍚�锛屽湪娑叉櫠椤ず灞忎笂灏囬’绀哄嚭姝ｇ⒑鐨勬韩搴﹀拰鐩稿皪(du矛)婵曞害锛屾纰虹殑琛ㄩ潰闃绘姉鍊肩偤娑叉櫠椤ず灞忎笂鐨勮畝鏁�(sh霉)涔樹互 10锛屽柈浣嶇偤姝愬/鈻°�� 渚嬪:
鏅跺睆涓婇’绀虹偤3.5脳10 4 姝愬/鈻�;瀵�(sh铆)闅涢樆鎶楀�肩偤3.5脳10 5 姝愬/鈻�銆�
浜�銆佽〃闈㈤浕闃绘脯(c猫)閲�(榛�(di菐n)灏�(du矛)榛�(di菐n)) (Surface ResistanceMeasurement (RTT))
閫欏��(g猫)娓�(c猫)閲忔柟娉曟槸绗﹀悎EOS/ESD-S4.1娓�(c猫)閲忚姹備締(l谩i)娓�(c猫)閲忕崹(d煤)绔嬩簬鎺ュ湴鐨勫叐榛�(di菐n)涔嬮枔鐨勯浕闃伙紝鐢ㄩ�欏��(g猫)娓�(c猫)閲忔柟娉曞緱鍑虹殑娓�(c猫)閲忕祼(ji茅)鏋滆垏琚脯(c猫)鐗╅珨鐨勮檿鐞�銆佸叐鍊�(g猫)5纾呮帰闋箣闁撶殑璺濋洟绛夊洜绱犳湁闂�(gu膩n)锛屽洜姝�锛屾噳(y墨ng)閬告搰姝ｇ⒑鐨勬脯(c猫)閲忚(gu墨)绋嬶紝姣忔鍦ㄥ悓妯ｈ姹傜殑娓�(c猫)閲忔浠朵笅閫�(j矛n)琛屾脯(c猫)瑭�銆� A 銆佸皣閫ｇ窔鎻掗牠鎻掑叆琛ㄧ殑鍏╁��(g猫)3.5姣背鎻掑瓟锛屽苟灏囬钑夋彃闋垏鍏╁��(g猫)5纾呴噸鎺㈤牠鐩歌伅(li谩n)銆�
B銆佹寜鐓ф脯(c猫)閲忚(gu墨)绋嬪皣鍏╁��(g猫)鎺㈤牠鏀剧疆鍦ㄥ緟娓�(c猫)鐗╅珨琛ㄩ潰銆�
C銆侀伕鎿囨墍闇�鐨勯浕澹撳��(10浼忔垨100浼�)
D銆佹寜涓嬮枊(k膩i)闂�(gu膩n)鐩村埌椤ず鍑烘墍閬哥殑闆诲鍊�(10浼忔垨100浼�)锛岀辜绾�(x霉)鎸夎憲闁�(k膩i)闂�(gu膩n)鐩磋嚦鎵�娓�(c猫)闆婚樆(鍠綅鐐烘瓙 濮�)锛岀浉灏�(du矛)婵曞害鍜屾韩搴﹂’绀哄湪娑叉櫠椤ず灞忎笂銆�
闆婚樆娓�(c猫)閲�
閫欏��(g猫)娓�(c猫)閲忔柟娉曟槸鐢ㄤ簬娓�(c猫)閲忕墿楂旇〃闈竴榛�(di菐n)鑸囪〃闈笂鍙︿竴鎺ュ湴榛�(di菐n)涔嬮枔鐨勮〃闈㈤浕闃伙紝娓�(c猫)閲忔柟娉曠鍚圗OS/ESD S4.1娓�(c猫)閲忔(bi膩o)婧�(zh菙n)銆�
A 銆佸皣鍏╂閫ｇ窔鐨勪竴绔垎鍒ユ彃鍏ヨ〃鐨勫叐鍊�(g猫)3.5姣背鎻掑瓟锛岀劧鍚庡皣鍏朵腑涓�姊濇帴楸烽瓪(y煤)澶�锛屽彟澶栦竴姊濊垏涓�鍊�(g猫)5纾呴噸鐩�(p谩n)褰㈡帰闋浉鑱�(li谩n)銆�
B銆佸皣楸烽瓪(y煤)澶惧瓙鎺ュ埌鎵�鐭ョ殑鎺ュ湴榛�(di菐n)涓�锛屾寜鐓ф脯(c猫)閲忚姹傚皣鐩�(p谩n)褰㈡帰闋斁鍦ㄥ緟娓�(c猫)鐗╅珨琛ㄩ潰涓�銆�
C銆佹寜涓嬫脯(c猫)閲忔寜閳曠洿鑷抽浕闃�(鍠綅鐐烘瓙濮�)銆佺浉灏�(du矛)婵曞害銆佹韩搴﹀�奸’绀哄湪椤ず灞忎笂锛屾脯(c猫)閲忕祼(ji茅)鏋滅鍚圗IA锛孍OS/ESD锛孉NSI锛� IEC-93,CECC,ASTM娓�(c猫)閲忔(bi膩o)婧�(zh菙n)锛屽皪(du矛)浜庨珮闃绘姉鏉愭枡鐨勬脯(c猫)閲忔檪(sh铆)鐐轰繚璀夋脯(c猫)寰楅珮绮惧害娓�(c猫)閲忕祼(ji茅)鏋�锛岄渶娉ㄦ剰涓嶈浣垮叐寮曠窔浜ょ枈锛屼笉瑕佺敤鎵嬫帴瑙告帰闋�锛屽紩绶氬拰琚脯(c猫)鐗╅珨銆�
鏍℃簴(zh菙n)姝ラ锛�
1 銆佽寖鍦嶇偤10 3 鍒�10 12 鍏锋湁绮惧害1%鐨勯樆鎶楅浕姗嬨�傞珮绮惧害鐩稿皪(du矛)婵曞害琛�(Relative Humidity Hygrometer)楂樼簿搴︽韩搴﹁〃(High accuracy Thermometer)
2銆佹墦闁�(k膩i)琛ㄨ搵锛屽皬蹇冨垏鑾悕鍌烽浕璺澘涓婂叐姊濋�ｆ帴闆绘簮闁�(k膩i)闂�(gu膩n)鐨勫皫(d菐o)绶�銆�
3銆佹壘鍒伴浕璺澘鍙充笅鏂逛笁鍊�(g猫)鏍℃瑾�(di脿o)绡�(ji茅)鍣�(Calibration Pots)
4銆佷娇琛ㄥ湪閫欎竴鐠�(hu谩n)澧冩浠朵笅璧风⒓1/2灏忔檪(sh铆)锛屽彇寰楄嚜骞宠 鍚庢墠鍙枊(k膩i)濮嬫脯(c猫)瑭�銆�
5銆侀噰鐢ㄦ脯(c猫)瑭﹀剙鑷付鐨勯�ｆ帴绶氫竴绔�ｆ帴涓婇狈榄�(y煤)澶�锛屽彟涓�绔钑夋彃闋��
6銆佸皣3.5姣背闀�(zh菐ng)鐨勬彃闋彃鍏ヨ〃鐨勬彃鍙ｃ��
7銆佺敤楸烽瓪(y煤)澶鹃�ｆ帴闆婚樆鍣ㄥ叐绔��
8銆佷笁鍊�(g猫)鏍℃瑾�(di脿o)绡�(ji茅)鍣紝鏈�涓婇潰鐨勭偤"婵曞害"娓�(c猫)閲�锛屼腑闁撶殑鐐�"闃绘姉"锛屾渶涓嬮潰鐨勭偤"婧害鐢ㄥ皬铏�(h脿o)铻虹挡鍒�瑾�(di脿o)绡�(ji茅)"銆傞爢鏅�(sh铆)閲�?l猫)杈冮(y脿n)妯甸痪鍙堝{(di脿o)绡�(ji茅)锛岄�嗘檪(sh铆)閲�?l猫)杈冮(y脿n)姒绘。妞{(di脿o)绡�(ji茅)銆�
9銆佹寜涓嬮浕婧愰枊(k膩i)闂�(gu膩n)锛屽悓鏅�(sh铆)姣旇純"婧害"锛�"婵曞害"鍜�"闆婚樆"鍊�銆�
10銆侀噵鏀鹃浕婧愰枊(k膩i)闂�(gu膩n)锛屽苟鎱㈡參瑾�(di脿o)绡�(ji茅)鐩告噳(y墨ng)鐨勬牎姝ｈ(di脿o)绡�(ji茅)鍣�銆�
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灏婃暚鐨勫鎴讹細
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